Versatile FE-SEM Series for Sub-Nanometer Imaging and Analysis

JEOL has launched a new series of field emission scanning electron microscopes (FE-SEM) that offer expanded imaging and analysis capabilities customizable to performance requirements. The JEOL JSM-7100F series offers sub-1 nm imaging capabilities and analytical characterization at the sub-100 nm scale, accomplished through the combination of large beam currents with a small probe size at any accelerating voltage.

Designed for the budget-conscious lab, the JSM-7100F model is a versatile, analytical field emission SEM that offers a new level of expanded performance. Through the unique ‘in-lens field emission gun’, the SEM delivers ? 200 nA of beam current to the sample. An aperture angle control lens (ACL) automatically optimizes both small probe current spot size for high resolution imaging and spot shape for high beam current, high resolution microanalysis, while a beam deceleration mode curtails charging on nonconductive specimens such as ceramics, semiconductors and polymers.

For advanced high resolution capabilities, the JSM-7100FT model features a newly redesigned hybrid lens and through-the lens detectors with energy filter. The improved electron optics design of this SEM column enables high resolution imaging of nanostructures and specimen surface details for any material type, including magnetic samples. With the integration of in-the-lens acceleration and deceleration of the electron beam, low kV aberrations are reduced, yielding higher resolution at the lowest accelerating voltages. Additionally, JEOL’s proven beam deceleration mode (GB Mode) decreases charging while imaging non-conductive specimens, improves spot size at low kV, and enhances surface topography.

This new series of Field Emission SEMs offers increased versatility for multiple analytical techniques and imaging and analysis of non-conductive samples. Each microscope model features a turbo molecular pump (TMP) and a rapid specimen exchange airlock to assure a clean vacuum environment is always maintained.

The optional LV function (up to 300 Pa) offers additional versatility to both JSM-7100F and JSM-7100FT. The LV function is fully controlled through the microscope user interface and allows all LV orifices to be retracted without breaking vacuum for unrestricted low magnification imaging and maximum beam current (200 nA) in high vacuum. The LV system is equipped with a solid-state BSE detector.

The JSM-7100F series is equipped with a large specimen chamber that accommodates a wide variety of detectors and accessories simultaneously and without compromising the performance of one another, including: multiple EDS, WDS, STEM, BSE, CL and IR camera. The system can also be equipped with a variety of sub stages including tensile, heating and cooling stages for in situ experimentation.